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Automatic pressure control CVD tube furnace system
  • Automatic pressure control CVD tube furnace system
  • Automatic pressure control CVD tube furnace system
  • Automatic pressure control CVD tube furnace system
  • Automatic pressure control CVD tube furnace system
  • Automatic pressure control CVD tube furnace system

    Model:KJ-1200T

    Description:

    It’s mainly used for the preparation of rare earth, electronic lighting, crystal annealing, bio ceramics, electronic ceramics, special alloys, magnetic materials, precision casting, metal heat treatment and other industrial vacuum sintering, protective at

    Brief Introduction:  
    It’s mainly used for the preparation of rare earth, electronic lighting, crystal annealing, bio ceramics, electronic ceramics, special alloys, magnetic materials, precision casting, metal heat treatment and other industrial vacuum sintering, protective atmosphere sintering, vacuum deposition, CVD experiments, material composition measurement occasions.
     
    The main features are as below:
    1. Great temperature uniformity.
    2. Over temperature protection and alarm
    3. PID automatic control via SCR power control
     
    Technical Parameter:
    Tube furnace part
    Model KJ-1200T
    Display LED
    Max. Temp. 1200C
    Working Temp. ≤1100℃
    Heating Rate Suggestion 0~10℃/min(max. 20℃/min)
    Temperature Zone 200mm+200mm+200mm
    Temperature Control Accuracy ±1℃
      Tube Size Φ50mm x 1200mm (OD x L)
    Can be customized according to customer needs
    Heating Element Fe-Cr-Al Alloy doped by Mo  
    Thermocouple N Type
    Temperature Control PID automatic control via SCR power control
    Heating curves 30 steps programmable
    Chamber material Alumina Fiber
    Warranty One year limited warranty (Consumable parts such as heating elements are not covered by the warranty)
    Pressure Regulation System
    One mass flow meter Which can regulate according to pump
    pressure
    tubflow meter
    pressure sensor
     
    (inficon brand: measuring range:3.8x10-5 to 1125
    Torr ) installed on outlet of furnace tube.
    pressure sensor 
    Touch Screen PLC Controller Regulate pressure from 50-300torr
    PLC controller 
    Notice: The regulate pressure is under furnace in horizontal direction.
    The result maybe different in vertical direction.
    Pirani Vacuum Gauge
    tube furance parts  Installed on gas inlet side of furnace
    tube
    Measuring range: 1×105~1×10-1Pa
    4 Channels MFC Gas Mixing Station
    Display LCD Touch Screen
    Working Temperature 5~45 ºC
    Max. Pressure: 3x10Pa
    Accuracy: ±1.5% FS
    Liner ±(0.5-1.5)%F.S.
    Duplicate accuracy: ±0.2%F.S.
    Structure Four precision mass flow meters:
    MFC 1: Flow range from 0~600 sccm for Ar
    MFC 2: Flow range from 0~600 sccm for N2
    MFC3: Flow rang from 0~600 sccm for forming gas (5%H2+95%N2)  
    MFC4: Oxygen:0-600sccm
    One gas mixing tank is installed on bottom case
    5 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually.
    Pls note Liquid or corrosion not supported.
    Reference Photo: tube furnace parts
    Scroll Vacuum Pump pats
    Nominal Rotation Speed 1800 rpm
    Displacement 3L/S
    Ultimate Vacuum 0.008mbar
    Noise Level 54dBA
    Inlet Flange NW 25
    Exhaust Flange NW 25
    Max Water Vapour Pumping Rate 100 gh-1
    Leak Tightness < 1×10-6mbar·l/s
    Cooling System Air cooled
    Operating Temperature 10 to 40℃
    The cart, bellow and clamp are included for one pump.
     
    Cold Trap
    Cold Trap Customized model,need to cooperate with water chiller
     
     
    Water Chiller
    Cooling Capacity 1000W
    Refrigerant Type R134a
    Precision ± 0.3℃
    Pump Power 0.03 kW
    Max. Lift 8M
    Flow 10L/min
    Tank Capacity 7L
    Inlet and Outlet Internal Φ8mm speedy connector
    Pagoda-shape connectors
    Control Type Digital Display
     
    VIII Filter
    Used in the inlet of vacuum pump
    cvd tube furnace

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    Relate Customer Case

    Tel Number

    180-3717-8440

    Email

    web@kejiafurnace.com

    FaceBook

    Zhengzhou/Kejia

    YouTuBe

    Zhengzhou/Kejia

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